Hi,
I was trying liftoff of PMMA resist. I had
deposited Nickel on PMMA, which is exposed. The
pattern was of 100nm scale. However even after 3 hours
of Ultrasonic Acetone Liftoff, I was not able to get
complete liftoff. I used sonic bath at 40C. If any one
knows to do liftoff at faster rate, please let me know
the procedure.
Thanks
Regards,
Madhav.