[mems-talk] Au electroplating

P.E.M. Kuijpers p.e.m.kuijpers at philips.com
Thu May 10 01:49:33 EDT 2007


Hello Kris,

We did  also electroplating of Au (sulphite based)on Ni, but we observed a 
very bad adhesion of Au onto the Ni seedlayer.
Did you observed this also or do you have a special pre-treatment to 
overcome this?

Regards,
Peter Kuijpers
MiPlaza
DTS/TFF
High Tech Campus 04
Room: WAGp5-11
5656 AE Eindhoven
The Netherlands

Phone.:  (+31 40 27) 98904 (mobex)
mobile:(+31) 06-12507027
fax.:     [+31 40 27) 44769
mailto:p.e.m.kuijpers at philips.com


kris <crikxo at yahoo.com> writes:
Subject [mems-talk] Au electroplating Classification

Hello All,

IS there a method to produce stress free Au
electroplated structures??

I am using sulphite bath and 1.5mA/cm^2 of the current
density. Ni is used as the seed layer.


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