[mems-talk] Au electroplating

David Roberts dave at prodigysurfacetech.com
Fri May 11 12:39:32 EDT 2007


Hi Peter,
A new E-less Ni shouldn't fire off (outplate).  Where does the fire off
occur? Everywhere, or only on your heater? Indirect heat should be used.
Regards,
Dave Roberts (Wafer Plating Specialist)
Prodigy Surface Tech.  Santa Clara, CA

-----Original Message-----
From: P.E.M. Kuijpers [mailto:p.e.m.kuijpers at philips.com] 
Sent: Thursday, May 10, 2007 11:24 PM
To: General MEMS discussion
Subject: RE: [mems-talk] Au electroplating

Hello Dave,

Another question about wafer plating:
We did install ENIG (Eletroless Nickel/Immersion Gold, Rohm and Haas 
chemicals).
After Nickel plating we observed outplating of our Ni bath? We do have N2 
bubbling in our bath for extra agitation.
Is there another simple solution to avoid this outplating?


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