[mems-talk] Quartz Etching

[Sreemanth M Uppuluri]

Hello All,

I am interested in etching quartz using photoresist as the mask. From a 
reference I found that BHF etches quartz at high speed and does not affect 
Shipley series photoresist. But when I did perform the etch I found that the 
photoresist has all been removed by the BHF solution. Can you please let me 
know what is going wrong. I am presently not using PDMS adhesive layer 
before coating photoresist on quartz. Could this be a reason?

Please let me know.

Thanks a lot,
Sreemanth