[mems-talk] Quartz Etching

[Bill Moffat]

Streemanth,
           Vacuum dehydrate and vapor HMDS deposit in vacuum vapor
prime.  It holds up to more than a 30 minute etch in BHF. If moisture
enters the equation the resist lifts in minutes.

Bill Moffat, CEO 
Yield Engineering Systems, Inc. 
203-A Lawrence Drive, Livermore, CA  94551-5152
(925) 373-8353
bmoffat at yieldengineering.com
www.yieldengineering.com