[mems-talk] Quartz Etching

[Andrea Mazzolari]

Which is BHF composition, which product from Shipley series are you using
? And which is etch time?

Andrea

> Hello All,
>
> I am interested in etching quartz using photoresist as the mask. From a
> reference I found that BHF etches quartz at high speed and does not affect
> Shipley series photoresist. But when I did perform the etch I found that
> the
> photoresist has all been removed by the BHF solution. Can you please let
> me
> know what is going wrong. I am presently not using PDMS adhesive layer
> before coating photoresist on quartz. Could this be a reason?