[mems-talk] wet etching of glass

Mohamad Hajj Hassan mohamad.hajj-hassan at polymtl.ca
Fri May 18 12:52:54 EDT 2007


Hello Everyone,

Could anyone provide me with a recipe for wet etching of glass to a depth of
500um? The masking layer is silicon, on which, a multilayer of metal Cr/Au is
deposited.

Thanks in advance,
Mohamad




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