[mems-talk] BCB

[deepa sree]

Saravan,

Are you curing BCB in the manufacturer's suggested low oxygen oven? We faced similar problems and bought another oven which purges oxygen from the chamber before raising the temperature to cure. It seems to fix it.

Deepa

saravan kallempudi <saravan_ece03 at yahoo.com> wrote: Hello,

I need spin BCB over patterned Gold, and Nickel.  Well  I am worrying about the cracks during curing of BCB.
Any suggestions  ?