[mems-talk] XeF2 etch on W

Bill Flounders bill at eecs.berkeley.edu
Thu May 24 10:56:26 EDT 2007

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Yes. Rapidly

kris wrote:
> Hello,
>
> I am using XACTIX to etch Si. I have Tungsten layer on
> silicon. I was wondering if XeF2 etches Tungsten.

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