[mems-talk] Parylene patterning

[Leyla Soleymani]

Hi Dirk,

thank you for your reply, by any chance do you know what should the ratio of
the resist thickness to parylene be?

Regards,
Leyla


On 5/24/07, Dirk.DeBruyker at parc.com <Dirk.DeBruyker at parc.com> wrote:
>
> Plasma etch and patience can do the job ;).
> Various oxygen plasma etch recipes for parylene have been reported (do
> eg a quick Google Scholar search on it).
> You can use resist as a mask but make sure it's (much) thicker than your
> parylene film; you can afterwards wash away the resist with acetone or
> your solvent of choice (the parylene will be inert in pretty much any
> solvent/etchant). I wouldn't recommend sonicating it though (depending
> on how good your parylene adheres to whatever your substrate is).