[mems-talk] evaporated zinc

Ivan Shubin ishubin at ucsd.edu
Thu May 24 15:13:22 EDT 2007


It wouldn't work with either surface. Need another metal before (thin
titanium for example).

Ivan Shubin,
Project Scientist
University of California, San Diego
ECE Department, EBU-1, Rm. 4809
La Jolla, CA 92093
ph. 858-822-3253
fax 858-534-6570

-----Original Message-----
From: Joseph Grogan [mailto:jgrogan at seas.upenn.edu] 
Sent: Wednesday, May 23, 2007 9:56 AM
To: General MEMS discussion
Subject: [mems-talk] evaporated zinc

Hi all,

I was wondering if anyone has ever evaporated zinc onto silicon or 
silicon nitride and could tell me whether the adhesion is good or bad. I

would simply try it out, but I don't have any zinc and I don't want to 
waste time and money buying some to explore this if the adhesion is 
known to be bad.

thanks,
Joe Grogan





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