[mems-talk] thin polyimide sensitive to i-line

[Ebin Liao]

Dear MEMS fellows,

I'm searching spin-coatable (1~2um) polyimide that is sensitive to i-line lithography. Since polyimide usuallly can't be coated for thickness in this range, thinner may have to used together. Anyone has ideas on where I can get this product? I've tried HD Microsystems but didn't get positive feedback. Thank you very much.

Rgds,
Ebin