[mems-talk] E-beam evaporation of Chrome on uncrosslinked SU-8

Yue Mun Pun, Jeffrey g0500396 at nus.edu.sg
Tue May 29 04:10:00 EDT 2007


Hi,
I would like to evaporate chromium on uncrosslinked SU-8.  Can anyone tell me if this is possible even if a low rate of evaporation is used?  Thanks.
 
Jeffrey


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