[mems-talk] E-beam evaporation of Chrome on uncrosslinked SU-8

[shay kaplan]

Jeff, 
I think the illumination from the source (boiling chrome is ~2700deg C) will
expose the SU8.

Shay

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of Yue Mun Pun, Jeffrey
Sent: Tuesday, May 29, 2007 11:10 AM
To: mems-talk at memsnet.org
Subject: [mems-talk] E-beam evaporation of Chrome on uncrosslinked SU-8

Hi,
I would like to evaporate chromium on uncrosslinked SU-8.  Can anyone tell
me if this is possible even if a low rate of evaporation is used?  Thanks.