[mems-talk] Fused Quartz Cleaning

[Julie Houser]

Hi Sreemanth,
If you don't find a cleaning solution that works, I could possibly repolish
it depending on the amount of material that can be removed.

Warm regards,
Julie
Mark Optics

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of Sreemanth M Uppuluri
Sent: Tuesday, May 29, 2007 7:23 PM
To: mems-talk at memsnet.org
Subject: [mems-talk] Fused Quartz Cleaning

Hello All,

Thank you all very much for the replies I got for my previous queries. I 
have another one now ;-)

I am trying to clean fused quartz wafers that have been used as substrates 
several times for coating photoresist (Shipley S-1800 series). I have tried 
solvent clean (Acetone & Methanol) and even Piranha (1:1) but still I see 
that the surface has some traces of photoresist on it. I would like to know 
the best procedure for removing organic and metallic contaminants (Cr,Al) 
from fused quartz wafers without affecting the wafer itself. Please let me 
know if you have any suggestions.