[mems-talk] Cambridge SPD file

[Zhanghua Han]

Dear all,


I am using the Leica EBL 100 nano writer e beam lithography for my work. But I am troubled by the preparation of spd files that are needed for the patterns, as I have to input the coordinates of every point via the text interface. And it is even troublesome when I am intending to have some curvilinear patterns. Is there any other approach to generate the spd format files? e.g. some GUI software to draw the patterns directly and the patterns can be saved as spd files and then be used for further conversion to EBEAM datas. Anyone can recommend some free softwares? Thank you in advance!

Regards,
Zhanghua

Email: zhanghua at coer.zju.edu.cn
Tel: +86 571 88206516 ext.107
Fax: +86 571 88206513