[mems-talk] SiN/SiN bonding and substrate etch

[Nicolas Duarte]

Chemical etchants such as KOH or EDP can remove the Silicon with good  
selectivity.

Nicolas Duarte
Ph.D. Candidate at Penn State University

On Oct 30, 2007, at 12:12 AM, Nor Hafizah Ngajikin wrote:

> Hi,
>
> I have a question on how and what material can be used to bond SiN  
> (wafer 1) with SiN (wafer 2). Secondly, does anybody know what  
> process can be used to totally remove a part of back side Si Wafer  
> without affecting the SiN layer  at the front side.
>
> 

Nicolas Duarte
Ph.D. Candidate at Penn State University