[mems-talk] e-beaming high thermal conductivity non-metals!

[Nitin Shukla]

Hi,
I want to deposit thin film of some nonmetal having high thermal conductivity (>10 W/m-K) on top of my samples using e-beam PVD deposition. I tried Si (k~140 W/m-K) and Al2O3 (k~40 W/m-K) but it appears e-beam produces amorphous form of these materials resulting in very low thermal conductivity of the deposited film (~ 1-2 W/m-K).
I was wondering if anyone could suggest me some high thermal conductivity non-metal that would maintain its high thermal conductivity in e-beam deposition.
Thanks,

  Nitin Shukla
  PhD Candidate
  Nanoscale Energy Transport Laboratory
  Department of Mechanical Engineering
  Virginia Tech
  Blacksburg, VA 24061
  Tel No: 540-231-5579