[mems-talk] a question about KOH etch back

[Chin-Jen Chiang]

Hi guys,
 
I am trying to etch back a Si bulk with KOH to remain a ~10 um thick membrace wirh an area of 0.5mm x 0.5mm. I am concerned if such a thin membrance with such a big area is very fragile and if it is achievable. Someone told me such a thin Si layer is not flexible as a thin nitride layer. Is that true? I appreciate your advices.
 
Lawrence