[mems-talk] black wax for koh etch

Chin-Jen Chiang chinjen_chiang at yahoo.com.tw
Mon Nov 5 18:44:01 EST 2007


Hi guys,
   
  For some reasons I can't use nitride or oxide layer as etch mask for KOH etching in my process and plan to use black wax as etch mask. Do you know where I can get the black wax. Dose the black wax need to be special one or the regular black wax used to wax car is fine. I will appreciate your advice. Thanks.
   
  Regards
  Lawrence



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