[mems-talk] black wax for koh etch
Chin-Jen Chiang
chinjen_chiang at yahoo.com.tw
Tue Nov 6 21:20:01 EST 2007
Dear Giancarlo,
Thanks a lot for your response.
Can you please give me some more details about protek? How dose it work (like wax?) and where I can get it?
Do you think wax is unable to resist KOH for long KOH etching? I need to have a long KOH etch for a 500 um Si bulk to remain a 10 um thinkness silicon membrance with 1mm by 1mm square.
Best regards
Lawrence
CANAVESE GIANCARLO <giancarlo.canavese at polito.it> 說:
Dear Chin-Jen Chiang
I think that protek is better than black wax for koh wet
etching protection.
Giancarlo Canavese
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