[mems-talk] black wax for koh etch

Chin-Jen Chiang chinjen_chiang at yahoo.com.tw
Tue Nov 6 21:20:01 EST 2007


Dear Giancarlo, 
   
  Thanks a lot for your response. 
  Can you please give me some more details about protek? How dose it work (like wax?) and where I can get it? 
   
  Do you think wax is unable to resist KOH for long KOH etching? I need to have a long KOH etch for a 500 um Si bulk to remain a 10 um thinkness silicon membrance with 1mm by 1mm square. 
   
  Best regards
  Lawrence

CANAVESE GIANCARLO <giancarlo.canavese at polito.it> 說:
  Dear Chin-Jen Chiang
I think that protek is better than black wax for koh wet 
etching protection.

Giancarlo Canavese



More information about the MEMS-talk mailing list