[mems-talk] Reasons for Plasma Flickering in Oxford Plasmalab 80 Plus RIE system

[PRAMOD GUPTA]

Purvi
   
  Thanks for your response. How did you solve the plasma flickering problem?
   
  With regards,
   

Pramod Gupta 
21084 Red Fir Court 
Cupertino, CA 95014 
Phone: (408) 253-1646

Purvi Kikani <purvikikani at yahoo.com> wrote:
  Dear Sir 
This has something to do with Flourine radicle. Because It happens with my experiment when I do Teflon like deposition using PTFE gas. 
As soon as I introduce PTFE gas inside reaction chamber, along with Nitrogen it starts flickering. 

The moment I switch off the PTFE gas flow, stable plasma is observed. 

Regards,


Ms. Purvi Kikani
Facilitation Centre for Industrial Plasma Technologies
INSTITUTE FOR PLASMA RESEARCH
An Autonomous Institute of Dept. of Atomic Energy, Govt. of India
B-15-17/P, GIDC Sector 25, Gandhinagar - 382044 (Gujarat), India.
Ph: +91-79-23235025, 23235018 Fax: +91-79-23235024
Email: purvi at ipr.res.in, purvikikani at yahoo.com web: www.plasmaindia.com