[mems-talk] Plasma cleaning tools

[Paul Monaghan]

Dear mems community;

I am looking at purchasing a plamsa cleaning tool system for cleaing surfaces. 
I envisage this will most likely be a simple oxygen barrel type  asher (to 
remove organic contamination from our surfaces) so nothing too exotic. I 
suspect powers in the region of 20 to 200W would be suffice though this by no 
means fixed. Could anyone point me in the direction of suppliers/manufacturers, 
second-hand suppliers and also if you have had any positive/negative 
experiences so I know what to avoid. Any comments would be appreciated,

Regards,

Paul