[mems-talk] Best resist for HF etching

[Mikael Evander]

Hi!

We usually have an etch-rate of 1.3 µm/min in borofloat. I'm not sure what you mean with the primer though. We buy borofloat chrome blanks, expose them, hardbake and etch. 

/Mikael

----- Original Message -----
From: Andrea Mazzolari <mazzolari at fe.infn.it>
Date: Friday, November 16, 2007 3:28 am
Subject: Re: [mems-talk] Best resist for HF etching

> Hello Mikael,
> which is borofloat etch rate ? Which primer do you use ?
> 
> Best regards,
> Andrea.