[mems-talk] Decreasing of TTV and Warp

[Andrea Mazzolari]

Hi all,
i need to decrease TTV and warp of some silicon wafers.
Initial ttv<3um, warp<20 um.

I have contacted different manufacturers of silicon wafers, but many does
not focus on warp reduction.

Any suggestion about tecniques to reduce both ttv and warp ? Any
suggestion about a manufacturer who could do this job ?

Many thanks,
Andrea