[mems-talk] Chrome Plasma Etching without Cl?

[K.P.Nichols at utwente.nl]

Has anyone had any success etching Chrome using plasmas from CHF3, SF6, O2, or N2  (or any combination thereof)? 

I don't have any good reason to suspect that any of these should work, but I can't use normal Chlorine plasmas with this device, as the exposed Au I have restricts which machines I'm permitted to use. I'm currently using wet etching, but I'd like to reduce the undercutting a bit.

Thanks,

Kevin Paul Nichols
MESA+ Institute for Nanotechnology
Mesoscale Chemical Systems
Meander 151
University of Twente
Postbus 217
7500 AE Enschede
The Netherlands

Office: +31 (0)53 489 26 31
Mobile: +31 (0)6 49 312 471
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Email : k.p.nichols at utwente.nl