[mems-talk] Chrome Plasma Etching without Cl?

[Bob Henderson]

Kevin:

Sorry but those chemistries won't work with Chrome. You could reduce your
undercut a little bit if you can use a spray process tool. There is better
conrol over the solution used and usually they have an endpoint signal that
can help to reduce overetch to a minimum. Bob Henderson

----- Original Message ----- 
From: <K.P.Nichols at utwente.nl>
To: <mems-talk at memsnet.org>
Sent: Wednesday, November 28, 2007 12:34 PM
Subject: [mems-talk] Chrome Plasma Etching without Cl?


Has anyone had any success etching Chrome using plasmas from CHF3, SF6, O2,
or N2  (or any combination thereof)?

I don't have any good reason to suspect that any of these should work, but I
can't use normal Chlorine plasmas with this device, as the exposed Au I have
restricts which machines I'm permitted to use. I'm currently using wet
etching, but I'd like to reduce the undercutting a bit.