[mems-talk] Chrome Plasma Etching without Cl?

[Michael D Martin]

If your Cr layer is thin you might be able to just sputter it off, even with oxygen.

-Michael Martin 
  U. of Louisville
 

>>> <K.P.Nichols at utwente.nl> 11/28/2007 2:34 PM >>>
Has anyone had any success etching Chrome using plasmas from CHF3, SF6, O2, or N2  (or any combination thereof)? 

I don't have any good reason to suspect that any of these should work, but I can't use normal Chlorine plasmas with this device, as the exposed Au I have restricts which machines I'm permitted to use. I'm currently using wet etching, but I'd like to reduce the undercutting a bit.