[mems-talk] About flatness of silicon wafers

Andrea Mazzolari mazzolari at fe.infn.it
Thu Nov 29 16:01:16 EST 2007


Hi All,
I'm interested to flat silicon wafers. Which are the parameters which
quantify flatness of a silicon wafer ? I know meaning of TTV, warp and Bow.
Is there something else which is specifing flatness of a silicon wafer ?

Many thanks,
Andrea




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