[mems-talk] bilayer recipes, HSQ

Serena Eley seley2 at uiuc.edu
Fri Nov 30 11:30:22 EST 2007


Hi,
I'm trying to reduce the proximity effect for closely-spaced arrays
written in HSQ.  I've read that using a bilayer such as HSQ/PMMA or
HSQ/PR is useful for reducing the proximity effect, but I haven't
found much information online.   Anyone have a good recipe for doing
this?
Thanks!


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