[mems-talk] Photoresist as etch mask!

Nitin Shukla nitin_cs at yahoo.com
Mon Oct 1 13:37:21 EDT 2007


Hi,
  I would appreciate if anyone could suggest me a photoresist that would not be etched by TMAH or KOH.

  Thanks,
Nitin Shukla

 
----------------------------------------------------
  Nitin Shukla
  PhD Candidate
  Nanoscale Energy Transport Laboratory
  Department of Mechanical Engineering
  Virginia Tech
  Blacksburg, VA 24061
  Tel No: 540-231-5579


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