[mems-talk] Quartz etching using RIE

[Sreemanth M Uppuluri]

Hello All,

I am trying to etch quartz by Deep-RIE process. The etch depth I need is 
around 10 microns. Can anyone please suggest a recipe for this. I have tried 
using Cr/Ni mask (Ni thickness of 70 nm) with CF4. But nickel got etched 
very fast and the maximum etch depth obtainable is around 1.5 microns.

Thanks,
Sreemanth