[mems-talk] Haze during wet oxidation

[mehmet at kimmonquartz.com]

Are you using HCl?
Mehmet
----- Original Message ----- 
From: "Shivalik Bakshi" <shivalik at hotmail.com>
To: <mems-talk at memsnet.org>
Sent: Monday, October 01, 2007 3:03 PM
Subject: [mems-talk] Haze during wet oxidation


Hello,

After undergoing a 1um wet oxidation @ 1050C, I notice a haze pattern on my 
silicon wafers. Sometimes there is ring of haze around the wafer edge while 
the center is clear. Other times, the center has haze while the edges are 
clear.

It is only visible under a strong white light.

Has anyone seen this occur on their wafers? Or come across literature that 
discuss this?

Thanks a lot,

Shivalik