[mems-talk] Clear Physical Mask

[Kris]

Hi,

You may want to try the photosensitive glass made by
Schott (FOTURAN), or by HOYA (PEG3). Supposed to be
easy to deal with; expose, heat treat and then etch in
dilute HF. HOYA calims min. features to within 10um.
Let me know and I can send you more information on
this.

Regards,
--Kris


--- jpt sharma <jptsharma at yahoo.com> wrote:

> Hi All
>   I am trying to make clear physical mask of feature
> size ~1 mm. Is there anyway to make it other than
> machining? The thickness is about ~0.8 mm.


K. Vossough, Ph.D.
Nano and Micro Technology Consultants
E-mail: vossough at memswork.net
Voice: (408)373-5413
Fax: (650)798-5001
http://www.memswork.net