[mems-talk] Photoresist as etch mask! (Nitin Shukla)

[Carlos Fragkiadakis]

Hello,
 
Look into the coatings provided by brewer science, they make some material that can be spun on the wafer to protect it during several hours of KOH. They provide details on their website. Recently I think they made a photo patternable KOH coating as well.
 
Probably you will have to use an adhesion promoter for the above coating as well(which they provide)