[mems-talk] conducitve DLC (ta:C)

[sebastian wicklein]

Dear Colleagues,

I was wondering if someone of you might know a company that is able to
deposit conductive DLC (ta:C) (Nitrogen-doped) on MEMS structures.

Reason for that is, I want to combine the low thermal conductivity of DLC
(~2-3 W/mK) with a proper electrical conductivity.


Regards,

Sebastian