[mems-talk] mask making servce provider?

[Shao Guocheng]

Dear Colleagues,

       Our pattern generator is down and it will take a whole while to have it fixed. Is there anyone know which company or lab can make masks for others? My mask is 5"by5" ordinary UV-lithography mask, 2micro resolution will be good enough for me. Any information will be appreciated. 
       If you have access to a pattern generator and would like to help me out, I can provide the soda lima substrate and any possible cost.
     thanks for your time.
   
  Guocheng Shao
  Department Of Mechanical Engineering
  Louisiana State University