[mems-talk] Adhesion of SU-8 and gold to glass wafer

Silvan Schmid silvan.schmid at micro.mavt.ethz.ch
Thu Oct 4 03:49:33 EDT 2007


Hi,

I recommend to use an adhesion layer for Au, such as Cr or Ti. You can
use the same with SU-8, but you do not need to.

Regards,
Silvan

Yue Mun Pun, Jeffrey schrieb:
> Hi,
> Can anyone tell me how I can ensure SU-8 and gold conductors adhere well to glass wafer?  


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