[mems-talk] fudging/spreading around the PR features

Sadhana Patil ek.sadhana at gmail.com
Fri Oct 5 13:44:38 EDT 2007


I am new to Photolithography. I am doing Photolithography with S1813.
Many a times I get fudging/spreading of photoresist around the edge of
the photoresist features after developing. They look more or less like
threads spreading outward from the feature.
Does anyone know what am I doing wrong?
~Sadhana


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