[mems-talk] fudging/spreading around the PR features

Sadhana Patil ek.sadhana at gmail.com
Sat Oct 6 09:09:47 EDT 2007


On 10/6/07, Sadhana Patil <ek.sadhana at gmail.com> wrote:
 Thank you Ed for your help.
I was suspecting my oven bake is causing the problem...because of
trapping the gases below resist...but wasn't sure. So your point #2
seems to be my answer. In this part you mentioned that there could be
too much or too less baking (hope I understant it right). So  do you
mean too less will cause threadlike structures and too much will cause
uneven resist thickness all over?
~Sadhana


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