[mems-talk] SU-8 on glass

[Yue Mun Pun, Jeffrey]

Hi,
I am using SU-8 2000 series and may need to use it on glass wafers.  Can anyone suggest how I can make SU-8 adhere to glass, whether I need to spin coat Omnicoat or treat the glass with oxygen plasma?
Also, how do I dice the glass wafers?  I have tried using a manual diamond scriber but it does not cut the glass in straight lines.

Mr. Jeffrey Mun Pun YUE
余文彬
Division of Bioengineering
E3A-07-02, Nanobioanalytics Lab
7 Engineering Drive 1
National University of Singapore
Singapore 117574
Tel: (65) 65166482, Fax: (65) 68723069
E-mail:  g0500396 at nus.edu.sg