[mems-talk] SU-8 on glass

[Silvan Schmid]

Dear Jeffrey,

if you clean the glass wafer with an oxygen plasma before you spin on
the SU-8, adhesion should not be an issue. Make sure that you get rid of
all water molecules on the glass surface. If you do not have a plasma,
at least perform a dry bake before applying the SU-8.

I recommend to cut the glass wafer with a wafer saw.

Regards,
Silvan

Yue Mun Pun, Jeffrey schrieb:
> Hi,
> I am using SU-8 2000 series and may need to use it on glass wafers.  Can anyone suggest how I can make SU-8 adhere to glass, whether I need to spin coat Omnicoat or treat the glass with oxygen plasma?
> Also, how do I dice the glass wafers?  I have tried using a manual diamond scriber but it does not cut the glass in straight lines.

-- 
ETH Zurich
Silvan Schmid, Dipl. Ing. ETH
Micro and Nanosystems
CLA G 14.2
Tannenstrasse 3
8092 Zurich, Switzerland

silvan.schmid at micro.mavt.ethz.ch
www.micro.mavt.ethz.ch

+41 44 632 44 53 phone
+41 44 632 14 62 fax