[mems-talk] SU-8 on glass

[GARCIA BLANCO Sonia]

Jeffrey,

I also observed that a piranha cleaning of the glass also helps adhesion of SU8. Of course, the dehydration step (in a hotplate at >120C or in the oven) is normally necessary.

Good luck!

Sonia.

-----Message d'origine-----
De : Silvan Schmid [mailto:silvan.schmid at micro.mavt.ethz.ch] 
Envoyé : Monday, October 08, 2007 10:11 AM
À : General MEMS discussion
Objet : Re: [mems-talk] SU-8 on glass

Dear Jeffrey,

if you clean the glass wafer with an oxygen plasma before you spin on the SU-8, adhesion should not be an issue. Make sure that you get rid of all water molecules on the glass surface. If you do not have a plasma, at least perform a dry bake before applying the SU-8.

I recommend to cut the glass wafer with a wafer saw.

Regards,
Silvan

Yue Mun Pun, Jeffrey schrieb:
> Hi,
> I am using SU-8 2000 series and may need to use it on glass wafers.  Can anyone suggest how I can make SU-8 adhere to glass, whether I need to spin coat Omnicoat or treat the glass with oxygen plasma?
> Also, how do I dice the glass wafers?  I have tried using a manual diamond scriber but it does not cut the glass in straight lines.