[mems-talk] breakdown voltage in MEMS structures

ashwini jambhalikar ashwini.jambhalikar at gmail.com
Fri Oct 12 01:16:36 EDT 2007


Friends,
can somebody give me some reference about following problem:

if the gap between two electrodes,is 5 micron / 8 micron/10 micron
what voltage can be safely applied for electrostatic actuation,
considering air or argon or nitrogen as dielectric.
Ashwini


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