[mems-talk] diffusion coefficients of Ar in Si and SiO2 ?

[Frank TORREGROSA]

I would like to submit the following question to mems-talk partners:

Does anyone knows diffusion coefficients of Ar in Si and SiO2 ?

Many thanks for your help

Best regards

Frank TORREGROSA
R&D Manager

ION BEAM SERVICES
ZI Peynier Rousset,
Rue G. Imbert Prolongée
F-13790 Peynier, FRANCE
Tel : +33 (0)4 42 53 89 64
Mob. : +33 (0)6 72 21 37 59
Fax : +33 (0)4 42 53 89 64
Mail : frank.torregrosa at ion-beam-services.fr