[mems-talk] cantilever electrodes

[vaibhav mathur]

I want to utilize MEMS  AlGaAs micro cantilevers that I fabricate on GaAs , as electrodes. For this, I believe I have to dope the AlGaAs layers very highly n type or p type, to achieve high conductivity. I want to bias the electrodes and generate a strong electric field in the vicinity of the device.. Can someone help in deciding the doping concentration for this.

Also, how closely in strenght and field generated do highly doped semiconductors behave when compared to traditional electrodes made out of copper or gold??


Regards
Vaibhav Mathur

_________________________________________________________________
Windows Live Spaces is here! It’s easy to create your own personal Web site.
http://spaces.live.com/?mkt=en-in