[mems-talk] thin silicon layers

[Andrea Mazzolari]

Hi all,

I need 1 micron thin (111) silicon layers. I have thought to realize them
starting from SOI wafers and whould have some suggestions.
I plan to use SOI wafers woth the following specs:
Device layer: (111), about 1 um thin
oxide layer: any thickness
bulk layer: (110) or (100)
I will remove bulk layer and silicon layer with KOH and so i will obtain a
thin (111) silicon layer. KOH will not etch (111) silicon layer.

As alternative, does someone know someone able to provide (111) silicon
layers about 1 micron thin ?

Best regards,
Andrea