[mems-talk] Exposure / Dosage rate calculation

[dbp lists]

Intensity(mW/cm2)  * time(s) = dose (mJ/cm2)  (at a given wavelength)

On 10/21/07, Vinodh Murali <vinodh_4411 at yahoo.com> wrote:
>
> Hello All,
>
> Currently I'm writing a paper and a part involves that I do some
> calculation on exposure time and dosage rate for a given intensity. I'm away
> from my university and am having trouble finding resources to help me in
> this calculation.
>
> Please let me know if there are any papers or manuals out there that would
> help me calculate the exposure time or dosage rate for a photolithographic
> process. I'd appreciate all the help this group can provide in helping me
> complete my paper.


-- 
Regards,
dbp