[mems-talk] Indium Deposition
K.P.Nichols at utwente.nl
K.P.Nichols at utwente.nl
Tue Oct 23 14:49:57 EDT 2007
A good general resource to check evaporation/sputtering conditions is:
http://www.lesker.com/newweb/menu_techinfo.cfm?CFID=1555271&CFTOKEN=59855514§ion=materialdeposition&init=skip
(if that link isn't permanent, google "lesker material deposition table")
Indium has lots of info available.
- Kevin
*********************************
Kevin Paul Nichols
MESA+ Institute for Nanotechnology
Mesoscale Chemical Systems
Meander 151
University of Twente
Postbus 217
7500 AE Enschede
The Netherlands
Office: +31 (0)53 489 26 31
Mobile: +31 (0)6 49 312 471
Fax : +31 (0)53 489 35 95
Email : k.p.nichols at utwente.nl
-----Original Message-----
From: mems-talk-bounces at memsnet.org on behalf of jpt sharma
Sent: Tue 10/23/2007 8:06 PM
To: mems-talk at memsnet.org
Subject: [mems-talk] Indium Deposition
Hi All
I am thinking of depositing indium for metal lift off. I am wondering anyone has done this before? Can we deposit Indium by thermal?
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