[mems-talk] Which metal is better for micro heater

[Cal Bear]

NiCr is used most often for micro heaters since its resistance changes very little with temperature.Best wishes,Mike 

> Date: Wed, 24 Oct 2007 21:36:01 +0800
> From: steven030505 at gmail.com
> To: mems-talk at memsnet.org
> Subject: [mems-talk] Which metal is better for micro heater
> 
> Hi,all
> To fabricate a micro heater with metal pattern, which metal is better,
> Al, Pt, or Au? Better means using low power to achieve the same
> temperature, lets say cost less than 10mW to get temperature around
> 100-200 degree with line width around 20um.